‏918.00 ₪

Conductive Atomic Force Microscopy - Applications in Nanomaterials

‏918.00 ₪
ISBN13
9783527340910
יצא לאור ב
Weinheim
זמן אספקה
21 ימי עסקים
עמודים
384
פורמט
Hardback
תאריך יציאה לאור
11 באוק׳ 2017
The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale.
The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale. To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM. With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.
מידע נוסף
עמודים 384
פורמט Hardback
ISBN10 3527340912
יצא לאור ב Weinheim
תאריך יציאה לאור 11 באוק׳ 2017
תוכן עניינים List of Contributors xi 1 Introduction, History, and Status of the CAFM 1 Chengbin Pan, Yuanyuan Shi, Fei Hui, Enric Grustan-Gutierrez, and Mario Lanza 1.1 The Atomic Force Microscope 1 1.2 The Conductive Atomic Force Microscope 4 1.3 History and Status of the CAFM 9 1.4 Editor s Choice: On the Use of CAFM to Study Nanogenerators Based on Nanowires 16 1.5 Conclusions 20 References 20 2 Fabrication and Reliability of Conductive AFM Probes 29 Oliver Krause, Fei Hui, andMario Lanza 2.1 Introduction 29 2.2 Manufacturing of Conductive AFM Probes 30 2.3 How to Choose Your C-AFM Tip 36 2.4 TipWear and Sample Damage: Applicable Forces and Currents in C-AFM 38 2.5 Conclusions 43 References 43 3 Fundamentals of CAFM Operation Modes 45 Guenther Benstetter, Alexander Hofer, Donping Liu,Werner Frammelsberger, and Mario Lanza 3.1 Introduction 45 3.2 Tip-Sample Interaction: Contact Area, Effective Emission Area, and Conduction Mechanisms 47 3.3 Work Function Difference and Offset Voltage 56 3.4 Operation Modes 60 3.5 Case Studies 64 3.6 Conclusion and Future Perspectives 70 Acknowledgment 70 References 71 4 Investigation of High-k Dielectric Stacks by C-AFM: Advantages, Limitations, and Possible Applications 79 Albena Paskaleva and Mathias Rommel 4.1 Introduction 79 4.2 Comparison BetweenMacroscopic I V Measurements and C-AFM 81 4.3 Influence of Displacement Currents on the Sensitivity of C-AFM Measurements 85 4.4 Applications of C-AFM 89 4.5 Conclusion 112 5 Characterization of Grain Boundaries in Polycrystalline HfO2 Dielectrics 119 K. Shubhakar, S. J O Shea, and K. L Pey 5.1 Introduction 119 5.2 Experimental Details and Sample Specifications 120 5.3 Formation of Grain Boundaries and Its Local Electrical Properties in HfO2 Dielectric 121 5.4 RVS and CVS Stressing of HfO2/SiOx Dielectric Stack 124 5.5 Uniform Stressing with Successive Scanning in CAFM Mode 126 5.6 Conclusions 130 References 130 6 CAFM Studies on Individual GeSi Quantum Dots and Quantum Rings 133 RongWu, Shengli Zhang, Yi Lv, Fei Xue, Yifei Zhang, and Xingju Yang 6.1 Introduction 133 6.2 Conductive Properties of Individual GeSi QDs and QRs 134 6.3 Modulating the Conductive Properties of GeSi QDs 144 6.4 SimultaneousMeasurements of Composition and Current Distributions of GeSi QRs 152 6.5 Conclusions 157 References 157 7 Conductive Atomic ForceMicroscopy of Two-Dimensional Electron Systems: FromAlGaN/GaN Heterostructures to Graphene and MoS2 163 Filippo Giannazzo, Gabriele Fisichella, Giuseppe Greco, Patrick Fiorenza, and Fabrizio Roccaforte 7.1 Introduction 163 7.2 Nanoscale Electrical Characterization of AlGaN/GaN Heterostructures 164 7.3 CAFM Characterization of Graphene and MoS2 171 7.4 Conclusions 181 Acknowledgments 182 References 182 8 Nanoscale Three-Dimensional Characterization with Scalpel SPM 187 Umberto Celano andWilfried Vandervorst 8.1 Introduction 187 8.2 SPM Metrology with Depth Information 188 8.3 Scalpel SPM: A Tip-Based Slice-and-ViewMethodology 190 8.4 Applications 196 8.5 Conclusions and Outlook 206 References 207 9 Conductive Atomic Force Microscopy for Nanolithography Based on Local Anodic Oxidation 211 Matteo Lorenzoni and Francesc Perez-Murano 9.1 Introduction to AFM Nanolithography 211 9.2 Local Anodic Oxidation 212 9.3 Kinetics of LAO 214 9.4 Measurement of Electrical Current During LAO 217 9.5 Conclusions 219 Acknowledgments 219 References 220 10 Combination of Semiconductor Parameter Analyzer and Conductive Atomic ForceMicroscope for Advanced Nanoelectronic Characterization 225 Vanessa Iglesias, Xu Jing, andMario Lanza 10.1 Introduction 225 10.2 Combination of SPA and CAFM for Local Channel Hot Carrier Degradation Analysis 227 10.3 Combination of CAFMand SPA for Resistive Switching Analyses 230 10.4 Conclusions 237 References 238 11 Design and Fabrication of a Logarithmic Amplifier for Scanning Probe Microscopes to AllowWide-Range Current Measurements 243 Lidia Aquilera and Joan Grifoll-Soriano 11.1 Introduction 243 11.2 Fabrication of a Logarithmic Preamplifier for CAFMS 244 11.3 Conclusions 258 References 261 12 Enhanced Current Dynamic Range Using ResiScope and Soft-Resiscope AFM Modes 263 L. Pacheco and N.F. Martinez 12.1 Introduction 263 12.2 Conductive AFM 264 12.3 ResiScope Mode 267 12.4 Soft-ResiScope Mode 271 12.5 Conclusions 275 References 275 13 Multiprobe Electrical Measurements without Optical Interface 277 David Lewis, Andrey Ignatov, Sasha Krol, Rimma Dekhter, and Alina Strinkovsky 13.1 Introduction 277 13.2 The Multiprobe Platform: Design and Key Features 279 13.3 The Present and the Future 284 13.4 Conclusions 292 14 KPFM and its Use to Characterize the CPD in Different Materials 297 Yijun Xia and Bo Song 14.1 Introduction 297 14.2 Kelvin Probe Force Microscopy 297 14.3 Applications of KPFM 301 14.4 Conclusion and Outlook 311 Acknowledgment 312 References 312 15 Hot Electron Nanoscopy and Spectroscopy (HENs) 319 A. Giugni, B. Torre,M. Allione, G. Perozziello, P. Candeloro, and E. Di Fabrizio 15.1 Introduction 319 15.2 Coupling Schemes 321 15.3 Plasmonic Device and Optical Characterization 326 15.4 Theoretical Section 327 15.5 HENs Measurements: Plasmon-Assisted Current Maps and Ultimate Spatial Resolution 335 15.6 Kelvin Probe, HENs, and Electrical Techniques 340 15.7 Fast Pulses in Adiabatic Compression for Hot Electron Generation 347 15.8 Conclusion 348 Acknowledgments 349 References 349 Index 355
זמן אספקה 21 ימי עסקים